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Hydrogen Technologies Standards form the basic framework for market ramp-up
More information
Climate change Standards and specifications support climate targets
More information
Smart Farming Standards and specifications are drivers for the digitalization of agriculture
More information

Standards [CURRENT]

OEVE/OENORM EN 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 62047-4:2008)

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 4: Fachgrundspezifikation für Mikrosystemtechnik (IEC 62047-4:2008)

Edition 2011-05-01

Original language German

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Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

OEVE/OENORM EN 62047-4 Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 62047-4:2008)

Want to learn more?

OEVE/OENORM EN 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 62047-4:2008)