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Standards [CURRENT]

SN EN 62047-6
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 6: Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht- Werkstoffen

Edition 2010-03
Original language German
Price from 25.80 €
Table of contents