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Standards [CURRENT]

BS EN 62047-6
Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials

Title (German)

Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht-Werkstoffen

Edition 2010-04-30
Original language English
Price from 192.70 €
Table of contents