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Standards [CURRENT]

SN EN 62047-2
Semiconductor devices - Micro-electromechanical devices. Part 2: Tensile testing methods of thin film materials

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik. Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen

Edition 2006-09
Original language German
Price from 25.00 €
Table of contents