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Standards [CURRENT]

SN EN 62047-3
Semiconductor devices - Micro-electromechanical devices. Part 3: Thin film standard test piece for tensile-testing

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik. Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung

Edition 2006-09
Original language German
Price from 25.00 €
Table of contents