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Technical rule [CURRENT]

ISO/TR 16268
Surface chemical analysis - Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

Title (German)

Chemische Oberflächenanalyse - Vorschlag für ein Verfahren für die Zertifizierung der zurückbehaltenen Partikel-Fluenz eines durch Ionenimplantation hergestellten Arbeits-Referenzmaterials

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 2 - General procedures  

Edition 2009-10
Original language English
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Table of contents

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