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Standards [CURRENT]

NF X21-066 ; NF ISO 23812:2009-06-01
Surface chemical analysis - Secondary ion mass spectrometry - Method for depth calibration for silicon using multiple delta-layer reference materials

Title (German)

Chemische Flächenanalyse - Sekundärionenmassenspektrometrie - Verfahren zur Tiefenkalibrierung für Silicium mit Mehrfach-Delta-Schicht-Bezugswerkstoffen

Edition 2009-06-01
Original language French
Price from 77.20 €
Table of contents