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Standards [CURRENT]

DIN 50455-1
Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Charakterisierung von Fotolacken - Teil 1: Bestimmung der Schichtdicke mit optischen Messverfahren

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2009-10
Original language German
Price from 42.10 €
Order from DIN Media
Table of contents

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