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Hydrogen Technologies Standards form the basic framework for market ramp-up
More information
Climate change Standards and specifications support climate targets
More information
Smart Farming Standards and specifications are drivers for the digitalization of agriculture
More information

Standards [CURRENT]

DIN 32566
Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Title (German)

Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie

Document: references other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems

Edition 2007-12

Original language German

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Table of contents

PDF (DE)

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Terminology

Hydrogen Technologies Standards form the basic framework for market ramp-up

Climate change Standards and specifications support climate targets

Smart Farming Standards and specifications are drivers for the digitalization of agriculture

DIN 32566 Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring

Document: references other documents

Responsible national committee

Lisa Henigin

Want to learn more?

DIN 32566
Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring