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IEC 47F/4/NP

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Future IEC 62047-10)

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IEC 47F/63/CDV

IEC 62047-10 Ed.1.0: Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials

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IEC 47F/4/NP

IEC 47F/63/CDV