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Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023)

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/FDIS 25178-604:2024); German and English version FprEN ISO 25178-604:2024

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