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DIN EN ISO 25178-604
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
DIN EN ISO 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178-603:2023); German and English version prEN ISO 25178-603:2023
DIN EN ISO 25178-605
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Design and characteristics of non-contact (point autofocus probe) instruments (ISO/DIS 25178-605:2023); German and English version prEN ISO 25178-605:2023