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Standards [CURRENT]

ISO 17109

Surface chemical analysis - Depth profiling - Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
Edition 2022-03

Standards [CURRENT]

ISO 17973

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
Edition 2024-07

Technical rule [CURRENT]

ISO/TR 18394

Surface chemical analysis - Auger electron spectroscopy - Derivation of chemical information
Edition 2016-05

Standards [CURRENT]

BS ISO 15471

Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
Edition 2016-09-30

Standards [CURRENT]

BS ISO 16242

Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES)
Edition 2011-12-31

Standards [CURRENT]

BS ISO 17109

Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films
Edition 2022-04-13

Standards [CURRENT]

BS ISO 17973

Surface chemical analysis. Medium-resolution Auger electron spectrometers. Calibration of energy scales for elemental analysis
Edition 2024-07-05

Standards [CURRENT]

BS ISO 18118

Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
Edition 2024-03-04

Standards [CURRENT]

PD ISO/TR 18394

Surface chemical analysis. Auger electron spectroscopy. Derivation of chemical information
Edition 2016-05-31

Standards [CURRENT]

BS ISO 20903

Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Methods used to determine peak intensities and information required when reporting results
Edition 2019-02-15

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