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Standards [CURRENT]

DIN 50451-6

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH₄F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid
Edition 2014-11

Standards [CURRENT]

DIN 50451-7

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS
Edition 2018-04

Standards [CURRENT]

DIN 50451-8

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 8: Determination of 33 elements in high-purity sulfuric acid by ICP-MS
Edition 2022-08

Standards [CURRENT]

DIN 50452-1

Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles
Edition 1995-11

Standards [CURRENT]

DIN 50452-2

Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters
Edition 2009-10

Standards [CURRENT]

DIN 50452-3

Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters
Edition 1995-10

Standards [CURRENT]

DIN 50453-1

Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 1: Silicium monocrystals, gravimetric method
Edition 2023-08

Standards [CURRENT]

DIN 50453-2

Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 2: Silicon-dioxide coating, optical method
Edition 2023-08

Standards [CURRENT]

DIN 50455-1

Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
Edition 2009-10

Standards [CURRENT]

DIN 50455-2

Testing of materials for semiconductor technology - Methods for the characterisation photoresists - Part 2: Determination of photosensitivity of positive photoresists
Edition 1999-11

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