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DIN 32563
Production equipment for microsystems - System for classification of components for microsystems
Edition
2002-03
DIN 32564-1
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
Edition
2004-05
DIN 32564-2
Production equipment for micro-systems - Terms and definitions - Part 2: Basic technologies and production
Edition
2004-05
DIN 32564-3
Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport
Edition
2004-05
DIN 32566
Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring
Edition
2007-12
DIN 32567-1
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences
Edition
2015-06
DIN 32567-2
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
Edition
2014-10
DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Edition
2024-11
DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Edition
2014-10
DIN 32567-4
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures
Edition
2015-06
