Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
Edition 2016-04

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Edition 2015-07

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Edition 2013-09

Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
Edition 2013-09

Semiconductor devices - Micro-electromechanical devices. Part 3: Thin film standard test piece for tensile-testing
Edition 2006-09

Film and hybrid integrated circuits. Part 5: Procedure for qualification approval
Edition 1997-12

Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
Edition 2014-09

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
Edition 2011-09

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
Edition 2010-03

Glossary of wastewater engineering terms
Edition 2014-05-16