Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Design and characteristics of non-contact (confocal chromatic probe) instruments (ISO/DIS 25178-602:2023); German and English version prEN ISO 25178-602:2023
Edition 2023-11

Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments (ISO 25178-602:2010); German version EN ISO 25178-602:2010
Edition 2011-01

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178-603:2023); German and English version prEN ISO 25178-603:2023
Edition 2023-12

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013); German version EN ISO 25178-603:2013
Edition 2014-02

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
Edition 2023-11

Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013
Edition 2013-12

Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Design and characteristics of non-contact (point autofocus probe) instruments (ISO/DIS 25178-605:2023); German and English version prEN ISO 25178-605:2023
Edition 2023-12

Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014); German version EN ISO 25178-605:2014
Edition 2014-06

Geometrical product specification (GPS) - Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015); German version EN ISO 25178-606:2015
Edition 2016-12

Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2019); German version EN ISO 25178-607:2019
Edition 2019-12