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DIN EN ISO 14644-5
Cleanrooms and associated controlled environments - Part 5: Operations (ISO/DIS 14644-5:2024); German and English version prEN ISO 14644-5:2024
Edition
2024-07
DIN EN ISO 14644-5
Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004); German version EN ISO 14644-5:2004
Edition
2005-03
DIN EN ISO 14644-7
Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004); German version EN ISO 14644-7:2004
Edition
2005-01
DIN EN ISO 14644-8
Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022); German version EN ISO 14644-8:2022
Edition
2022-10
DIN EN ISO 14644-9
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022); German version EN ISO 14644-9:2022
Edition
2022-10
DIN EN ISO 14644-10
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022); German version EN ISO 14644-10:2022
Edition
2022-10
DIN EN ISO 14644-13
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017); German version EN ISO 14644-13:2017
Edition
2017-11
DIN EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016
Edition
2017-01
DIN EN ISO 14644-15
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017); German version EN ISO 14644-15:2017
Edition
2018-03
DIN EN ISO 14644-16
Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices (ISO 14644-16:2019); German version EN ISO 14644-16:2019
Edition
2020-06