Microbeam analysis. Electron probe microanalysis. Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
Edition 2024-06-10

Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
Edition 2018-11-05

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Edition 2014-07-31

Surface chemical analysis. X-ray photoelectron spectroscopy. Description of selected instrumental performance parameters
Edition 2017-03-31

Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
Edition 2016-09-30

Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
Edition 2018-11-19

Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES)
Edition 2011-12-31

Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films
Edition 2022-04-13

Surface chemical analysis. Vocabulary. General terms and terms used in spectroscopy
Edition 2023-06-26

Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
Edition 2024-03-04