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Technical rule [CURRENT]

VDI 3823 Blatt 1

Vacuum coating quality assurance - Characteristics, applications and procedures
Edition 2006-11

Technical rule [CURRENT]

VDI/VDE 2656 Blatt 1

Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems
Edition 2019-09

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VDI 3823 Blatt 1

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