Metallic and other non-organic coatings - Measurement of coating thicknesses - Fizeau multiple-beam interferometry method (ISO 3868:1976)
Edition 1995

Fibre optic interconnecting devices and passive components - Basic test and measurement procedures - Part 3-47: Examinations and measurements - End face geometry of PC/APC spherically polished ferrules using interferometry (IEC 61300-3-47:2014); German version EN 61300-3-47:2014
Edition 2015-04

Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 4: Interpretation and evaluation of tolerances specified in ISO 10110 (ISO 14999-4:2015)
Edition 2016-04

Metallic and other non-organic coatings - Measurement of coating thicknesses - Fizeau multiple-beam interferometry method (ISO 3868:1976); German version EN ISO 3868:1994
Edition 1995-01

Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013
Edition 2013-12

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013); German version EN ISO 25178-603:2013
Edition 2014-02

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178-603:2023); German and English version prEN ISO 25178-603:2023
Edition 2023-12

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
Edition 2023-11

Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 4: Interpretation and evaluation of tolerances specified in ISO 10110 (ISO 14999-4:2015); Corrigendum 1
Edition 2022-05

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences
Edition 2015-06