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  3. Hydrogen
Standard [PUBLISHED]

DIN 50450-9
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of oxygen impurity in N<sub>2</sub>, Ar, He, Ne and H<sub>2</sub> by using a galvanic cell

Title (German)

PrüfungvonMaterialienfürdieHalbleitertechnologie–BestimmungvonVerunreinigungeninTräger-undDotiergasen–Teil9:BestimmungvonSauerstoff,Stickstoff,Kohlenstoffmonooxid,Kohlenstoffdioxid,WasserstoffundC1-C3-KohlenwasserstoffeninChlorwasserstoffmitGaschromatographie

Brief description

This document specifies a method for the determination of the molar ratio of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C1-C3 hydrocarbons in gaseous hydrogen chloride from the gas phase.

Issue date

2021-07

Developing committee

NA 062-05-73 AA - Gas analysis and gas quality

National mirror committee

NA 062-05-73 AA - Gas analysis and gas quality

areas / working committees

Quality Infrastructure

topic / sub working committees

Measurement technology

topics / working groups

Gas analysis
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