2. Innovation and research
  3. Hydrogen
Standard [PUBLISHED]

DIN 50450-2
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of oxygen impurity in N<sub>2</sub>, Ar, He, Ne and H<sub>2</sub> by using a galvanic cell

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung der Sauerstoffverunreinigung in Stickstoff, Argon, Helium, Neon und Wasserstoff mittels einer galvanischen Meßzelle

Brief description

The standard should define the test method for determining the content of O2 in the carrier and doping gases N2, Ar, He, Ne and H2.

Issue date

1991-03

Developing committee

NA 062-05-73 AA - Gas analysis and gas quality

National mirror committee

NA 062-05-73 AA - Gas analysis and gas quality

areas / working committees

Quality Infrastructure

topic / sub working committees

Measurement technology

topics / working groups

Gas analysis
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