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Standard [PUBLISHED]

DIN 50450-1
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung der Wasserverunreinigung in Wasserstoff, Sauerstoff, Stickstoff, Argon und Helium mittels einer Diphosphorpentoxidzelle

Brief description

The standard determines a test method for the determination of water impurity in carrier gases and doping gases (H2, O2, N2, Ar, He) used in the semi conductor technology.

Issue date

1987-08

Developing committee

NA 062-05-73 AA - Gas analysis and gas quality

National mirror committee

NA 062-05-73 AA - Gas analysis and gas quality

areas / working committees

Quality Infrastructure

topic / sub working committees

Measurement technology

topics / working groups

Gas analysis
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