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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

ISO 18516
Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution

Title (German)

Chemische Analytik an Oberflächen - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 2 - General procedures  

Edition 2006-11
Original language English
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