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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50451-3
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 3: Aluminium (Al), Cobalt (Co), Kupfer (Cu), Natrium (Na), Nickel (Ni) und Zink (Zn) in Salpetersäure mittels ICP-MS

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2003-04
Original language German
Price from 42.10 €
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