NA 062
DIN Standards Committee Materials Testing
Standards
[CURRENT]
ISO 5820
ISO 5820
Microbeam analysis - Hyper-dimensional data file specification (HMSA)
Title (German)
Mikrobereichsanalyse - Hyperdimensionale Dateispezifikation (HMSA)
Responsible national committee
NA 062-08-18 AA - Electron microscopy and microbeam analysis