NA 062
DIN Standards Committee Materials Testing
Standards
[CURRENT]
DIN 50453-2
DIN 50453-2
Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 2: Silicon-dioxide coating, optical method
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung der Ätzrate von Ätzmischungen - Teil 2: Siliciumdioxid-Schichten, Optisches Verfahren
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology
