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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

ISO 23170
Surface chemical analysis - Depth profiling - Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering

Title (German)

Chemische Oberflächenanalyse - Tiefenprofilierung - Zerstörungsfreie Tiefenprofilierung nanoskaliger Schwermetalloxid-Dünnschichten auf Si-Substraten mit mittelenergetischer Ionenstreuung

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 4 - Depth profiling  

Edition 2022-06
Original language English
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Table of contents

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