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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

DIN ISO 15632
Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) (ISO 15632:2021)

Title (German)

Mikrobereichsanalyse - Ausgewählte instrumentelle Performanceparameter zur Spezifizierung und Überprüfung engergiedispersiver Röntgenspektrometer (EDS) für die Anwendung mit einem Rasterelektronenmikroskop (REM) oder einem Elektronenstrahlmikroanalysator (ESMA) (ISO 15632:2021)

Responsible national committee

NA 062-08-18 AA - Electron microscopy and microbeam analysis  

Responsible international committee

ISO/TC 202 - Microbeam analysis  

Edition 2022-09
Original language German
Translation English
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