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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

ISO 16531
Surface chemical analysis - Depth profiling - Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Title (German)

Chemische Oberflächenanalyse - Tiefenprofilierung - Verfahren zur Einstellung des Ionenstrahls und damit verbundene Messung der Stromstärke oder der Stromdichte zur Tiefenprofilierung in AES und XPS

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 4 - Depth profiling  

Edition 2020-10
Original language English
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Table of contents

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