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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

ISO 14237
Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

Title (German)

Chemische Oberflächenanalyse - Sekundärionenmassenspektrometrie - Bestimmung des Elementgehalts von Bor in Silizium unter Verwendung gleichförmig dotierter Materialien

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 6 - Mass spectrometries  

Edition 2000-02
Original language English
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