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NA 062

DIN Standards Committee Materials Testing

About NMP Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

ISO 11952
Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

Title (German)

Chemische Oberflächenanalyse - Rastersondenmikroskopie - Bestimmung geometrischer Kenngrößen mit Rastersondenmikroskopie: Kalibrierung von Messsystemen

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy

Responsible international committee

ISO/TC 201/SC 9 - Scanning probe microscopy

Edition 2019-05

Original language English

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Table of contents

PDF (EN)

Contact

Steffen Jenkel

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

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Terminology

DIN Standards Committee Materials Testing

ISO 11952 Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

Responsible national committee

Responsible international committee

Steffen Jenkel

ISO 11952
Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems