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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

ISO 22415
Surface chemical analysis - Secondary ion mass spectrometry - Method for determining yield volume in argon cluster sputter depth profiling of organic materials

Title (German)

Chemische Oberflächenanalyse - Sekundärionen-Massenspektrometrie - Verfahren zur Bestimmung der Volumenausbeute bei der Tiefenprofilierung von organischen Materialien mit Argon-Cluster-Sputtern

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 6/WG 4 - Organic and Nano SIMS  

Edition 2019-05
Original language English
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Table of contents

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