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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

ISO 18516
Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

Title (German)

Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 2 - General procedures  

Edition 2019-01
Original language English
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Table of contents

Contact

Steffen Jenkel

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

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