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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

ISO 14701
Surface chemical analysis - X-ray photoelectron spectroscopy - Measurement of silicon oxide thickness

Title (German)

Chemische Oberflächenanalyse - Röntgenphotoelektronenspektroskopie - Messung der Siliziumoxiddicke

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 7/WG 2 - Quantification and interpretation of data in electron spectroscopy  

Edition 2018-11
Original language English
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Table of contents

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Steffen Jenkel

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