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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

DIN 50451-7
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 7: Bestimmung von 31 Elementen in hochreiner Salzsäure mittels ICP-MS

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2018-04
Original language German
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Contact

Denise Winter

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