DIN Standards Committee Materials Testing
DIN EN ISO 14644-13
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017); German version EN ISO 14644-13:2017
Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und Chemikalienklassifikationen (ISO 14644-13:2017); Deutsche Fassung EN ISO 14644-13:2017
Document: references other documents
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible european committee
CEN/TC 243 - Cleanroom technology
Responsible international committee
ISO/TC 209 - Cleanrooms and associated controlled environments