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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

DIN 50452-1
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Teilchenanalytik in Flüssigkeiten - Teil 1: Mikroskopische Teilchenbestimmung

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 1995-11
Original language German
Price from 34.60 €
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Table of contents

Contact

Denise Winter

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10787 Berlin

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