DIN Standards Committee Materials Testing
DIN EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016
Reinräume und zugehörige Reinraumbereiche - Teil 14: Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft (ISO 14644-14:2016); Deutsche Fassung EN ISO 14644-14:2016
Overview
This standard links the cleanroom classification of air cleanliness by particle concentration to the suitability of equipment for use in cleanrooms and associated controlled environments. This standard specifies a methodology to assess the suitability of equipment (for example, machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 μm to equal to or larger than 5 μm (given in ISO 14644-1).
Document: references other documents
Document: referenced in other documents
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
