DIN Standards Committee Materials Testing
DIN ISO 22309
Microbeam analysis - Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above (ISO 22309:2011)
Mikrobereichsanalyse - Quantitative Analyse mittels energiedispersiver Spektroskopie (EDS) für Elemente mit der Ordnungszahl 11 (Na) oder höher (ISO 22309:2011)
Overview
This International Standard gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA); any expression of amount, that is in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in this International Standard. This International Standard provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilizing either reference materials or “standardless” procedures. It can be used with confidence for elements with atomic number Z larger than 10. The responsible German committee for this standard is Working Committee NA 062-08-18 AA "Elektronenmikroskopie und Mikrobereichsanalyse" ("Electron microscopy and microbeam analysis") at DIN Standards Committee Materials Testing (NMP).
Document: references other documents
Document: referenced in other documents
Responsible national committee
NA 062-08-18 AA - Electron microscopy and microbeam analysis
