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NA 062

DIN Standards Committee Materials Testing

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Standards [Withdrawn]

DIN 50451-3
Testing of materials for semiconductor technology - Determination of traces of metals in liquids - Part 3: Al, Co, Cu, Na, Ni and Zn in nitric acid with ICP-MS

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Metallspuren in Flüssigkeiten - Teil 3: Aluminium (Al), Kobalt (Co), Kupfer (Cu), Natrium (Na), Nickel (Ni), Zink (Zn) in Salpetersäure mittels ICP-MS

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 1994-10
Original language German
Price from 34.60 €
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