2. Getting involved
  3. Standards Committees
  4. NMP
NA 062

DIN Standards Committee Materials Testing

About NMP Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees
Standards [Withdrawn]

DIN 50455-1
Testing of materials for semiconductor technology; methods for characterizing photoresists; determination of coating thickness with optical methods

Title (German)

Prüfung von Materialien für die Halbleitertechnologie; Verfahren zur Charakterisierung von Fotolacken; Bestimmung der Schichtdicke mit optischen Meßmethoden

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 1991-06
Original language German
Price from 34.60 €
Order from DIN Media
Table of contents

Contact

Denise Winter

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2199
Fax: +49 30 2601-42199

Send message to contact