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NA 062

DIN Standards Committee Materials Testing

About NMP Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

ISO 12406
Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of arsenic in silicon

Title (German)

Chemische Oberflächenanalyse - Sekundärionenmassenspektroskopie - Verfahren zur Tiefenprofilanalyse von Arsen in Silicium

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy

Responsible international committee

ISO/TC 201/SC 6 - Mass spectrometries

Edition 2010-11

Original language English

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Table of contents

PDF (EN)

Contact

Steffen Jenkel

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

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Terminology

DIN Standards Committee Materials Testing

ISO 12406 Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of arsenic in silicon

Responsible national committee

Responsible international committee

Steffen Jenkel

ISO 12406
Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of arsenic in silicon