NA 062
DIN Standards Committee Materials Testing
Standards
[Withdrawn]
DIN 50451-1
DIN 50451-1
Testing of materials for semiconductor technology; determination of traces of metals in liquids; Ag, Au and Cu in nitric acid by means of AAS
Title (German)
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Metallspuren in Flüssigkeiten; Silber (Ag), Gold (Au) und Kupfer (Cu) in Salpetersäure mittels AAS
Document: references other documents
Document: referenced in other documents
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology