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NA 062

DIN Standards Committee Materials Testing

About NMP Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [Withdrawn]

DIN 50451-5
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 5: Leitlinie zur Auswahl von Werkstoffen und Prüfung ihrer Eignung für Geräte zur Probenahme und Probenvorbereitung für die Elementspuren-Bestimmung im Bereich von Mikrogramm je Kilogramm und Nanogramm je Kilogramm

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology

Edition 2010-03

Original language German

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Table of contents

PDF (DE)

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