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NA 062

DIN Standards Committee Materials Testing

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Standards [CURRENT]

DIN 50452-2
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Teilchenanalytik in Flüssigkeiten - Teil 2: Teilchenbestimmung mit optischen Durchflusspartikelzählern

Document: references other documents

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2009-10
Original language German
Price from 56.60 €
Order from DIN Media
Table of contents

Contact

Denise Winter

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10787 Berlin

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