NA 062

DIN Standards Committee Materials Testing

Project

Atomic Layer Deposition-- Chemical characteristics and related process specifications of atomic layer deposition precursors

Begin

2024-05-24

Planned document number

ISO/WD 19383

Responsible national committee

NA 062-01-61 AA - Measuring and test methods for coatings and coating systems  

Responsible international committee

ISO/TC 107/WG 5 - Atomic layer deposition  

Contact

Clemens Judersleben

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2210
Fax: +49 30 2601-42210

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