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NA 062

DIN Standards Committee Materials Testing

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Draft standard [Withdrawn]

DIN 50451-4
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology

Edition 2024-01

Original language German

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Terminology

DIN Standards Committee Materials Testing

DIN 50451-4 Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Responsible national committee

Denise Winter

DIN 50451-4
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)