DIN Standards Committee Heating and Ventilation Technology and their Safety
ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Reinräume und zugehörige Reinraumbereiche - Teil 14: Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft
Responsible national committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)
Responsible international committee
ISO/TC 209/WG 11 - Assessment of suitability of equipment and materials for cleanrooms